TMP | TMP-203LM | TMP-203LMC | |
---|---|---|---|
Rotor coating | None | Coated | |
Applicable power supply | EI-S04M | ||
Inlet flange | VG100 / ICF152 / ISO100B / ISO100C | ||
Outlet flange | KF25 | ||
Cooling method | Water cooled | ||
Ultimate pressure (after baking) Pa (Torr) | 10 -8 Pa order | 10 -7 Pa order | |
Maximum inlet pressure during
continuous operation(N 2) |
200 Pa | ||
Maximum outlet pressure during
continuous operation |
400 Pa | ||
Pumping speed | N 2 | 190 L/s | |
He | 140 L/s | ||
H 2 | 120 L/s | ||
Compression ratio | N 2 | 1×(10 9) | |
He | 6×(10 4) | ||
H 2 | 4×(10 3) | ||
Rated rotation speed | 50000 rpm | ||
Startup time | Within 5 minutes | ||
Direction of installation | Arbitrary | ||
Baking temperature of pump inlet | 120 °C or lower | ||
Vibration, measured by the Shimadzu method | Less than 0.012 μm (single amplitude) | ||
Recommended purge gas flowrate | 20 to 30 mL/min | ||
Recommended pumping speed of backing
vacuum pump during gas purging |
200 L/min or higher | ||
Operational ambient temperature range | Operation: 0 °C to 40 °C /
Storage: -25 °C to 70 °C |
||
Allowable magnetic flux density | Radial directions | 3 mT | |
Axial directions | 15 mT | ||
Cooling water | Flowrate | 1 to 3 L/min | |
Pressure | 0.2 to 0.5 Mpa | ||
Temperature | 5 to 30 ˚C | ||
Weight | 9 kg |