TMP | TMP-403M | TMP-403MC | |
---|---|---|---|
Rotor coating | None | Coated | |
Applicable power supply | EI-S04M | ||
Inlet flange | VG150 / ICF203 / ISO160B / ISO160C | ||
Outlet flange | KF25 | ||
Cooling method | Air cooled | ||
Ultimate pressure (after baking) Pa (Torr) | 10 -8 Pa order | 10 -7 Pa order | |
Maximum inlet pressure during
continuous operation (N 2) |
1.3 Pa | ||
Maximum outlet pressure during
continuous operation |
40 Pa | ||
Pumping speed | N 2 | 420 L/s | |
He | 360 L/s | ||
H 2 | 340 L/s | ||
Compression ratio | N 2 | 1×(10 9) | |
He | 8×(10 4) | ||
H 2 | 1×(10 4) | ||
Rated rotation speed | 45000 rpm | ||
Startup time | Within 5 minutes | ||
Direction of installation | Arbitrary | ||
Baking temperature of pump inlet | 120˚C or lower | ||
Vibration, measured by the Shimadzu method | Less than 0.012µm (single amplitude) | ||
Recommended purge gas flowrate | 20 to 30mL/min | ||
Recommended pumping speed of backing
vacuum pump during gas purging |
200 L/min or higher | ||
Operational ambient temperature range | Operation:0˚C to 40˚C /
Storage: -25˚C to 70˚C |
||
Allowable magnetic flux density | Radial directions | 3 mT | |
Axial directions | 15 mT | ||
Weight | 14 kg |