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Shimadzu Korea Vacuum Equipment Co., Ltd.

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Turbo Molecular Pump

TMP-403 수냉
TMP TMP-403LM TMP-403LMC
Rotor coating None Coated
Applicable power supply EI-S04M
Inlet flange VG150 / ICF203 / ISO160B / ISO160C
Outlet flange KF25
Cooling method Water cooled
Ultimate pressure (after baking) Pa (Torr)
10 -8 Pa order 10 -7 Pa order
Maximum inlet pressure during
continuous operation (N 2)
200 Pa
Maximum outlet pressure during
continuous operation
400 Pa
Pumping speed N 2 420 L/s
He 360 L/s
H 2 340 L/s
Compression ratio N 2 1×(10 9)
He 8×(10 4)
H 2 1×(10 4)
Rated rotation speed 45000 rpm
Startup time Within 5 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120 ˚C or lower
Vibration, measured by the Shimadzu method Less than 0.012 µm (single amplitude)
Recommended purge gas flowrate 20 to 30 mL/min
Recommended pumping speed of backing
vacuum pump during gas purging
200 L/min or higher
Operational ambient temperature range Operation:0 ˚C to 40 ˚C /
Storage: -25 ˚C to 70 ˚C
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 1 to 3 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 30 ˚C
Weight 14 kg