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Shimadzu Korea Vacuum Equipment Co., Ltd.

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BEST for Semi & FPD Customers

Turbo Molecular Pump

TMP-1003 공냉
TMP TMP-1003M TMP-1003MC
Rotor coating None Coated
Applicable power supply EI-R04M
Inlet flange VG200 / ICF253 / ISO200B
Outlet flange KF40
Cooling method Air cooled
Ultimate pressure (after baking) Pa (Torr) 10 -9 Pa order 10 -8 Pa order
Maximum inlet pressure during
continuous operation (N 2)
1.3 Pa
Maximum outlet pressure during continuous operation 40 Pa
Pumping speed N 2 1080 L/s
He 930 L/s
H 2 790 L/s
Compression ratio N 2 1×(10 9)
He 8×(10 4)
H 2 4×(10 3)
Rated rotation speed 35000 rpm
Startup time Within 5 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120 ˚C or lower
Vibration, measured by the Shimadzu method Less than 0.01 µm (single amplitude)
Recommended purge gas flowrate 20 to 30 mL/min
Recommended pumping speed of backing
vacuum pump during gas purging
500 L/min or higher
Operational ambient temperature range Operation:0 ˚C to 40 ˚C /
Storage: -25 ˚C to 70 ˚C
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Weight 32 kg max.