Shimadzu Korea Vacuum Equipment Co., Ltd.
- Turbo Molecular Pump
- Helium Leak Detector
- Hydraulic Gear Pump
- Oil Rotary Vacuum Pump
- Balancing Machine
- Sputtering Machine
- Vacuum Heat-Treatment
- X-Ray Inspection System
TMP-1303
| TMP | TMP-1303LM(0) | TMP-1303LMC(0) | |
|---|---|---|---|
| Rotor coating | None | Coated | |
| Applicable power supply | EI-R04M | ||
| Inlet flange | VG200 / ICF253 / ISO200B | ||
| Outlet flange | KF40 | ||
| Cooling method | Water cooled | ||
| Ultimate pressure (after baking) Pa (Torr) | 10 -8 Pa order | 10 -7 Pa order | |
| Maximum flowrate of Ar gas | 500 mL/min | 800 mL/min | |
| Maximum inlet pressure during
continuous operation (N 2) |
133 Pa | ||
| Maximum outlet pressure during continuous operation | 270 Pa | ||
| Pumping speed | N 2 | 1300 L/s | |
| He | 1050 L/s | ||
| H 2 | 750 L/s | ||
| Compression ratio | N 2 | 6×(10 8) | |
| He | 1×(10 4) | ||
| H 2 | 1×(10 3) | ||
| Rated rotation speed | 30300 rpm | ||
| Startup time | Withi 7 minutes | ||
| Direction of installation | Arbitrary | ||
| Baking temperature of pump inlet | 120 ˚C or lower | ||
| Vibration, measured by the Shimadzu method | Less than 0.01 µm (single amplitude) | ||
| Recommended purge gas flowrate | 20 to 30 mL/min | ||
| Recommended pumping speed of backing
vacuum pump during gas purging |
600 L/min or higher | ||
| Operational ambient temperature range | Operation: 0 ˚C to 40 ˚C /
Storage: -25 ˚C to 70 ˚C |
||
| Allowable magnetic flux density | Radial directions | 3 mT | |
| Axial directions | 15 mT | ||
| Cooling water | Flowrate | 1 to 3 L/min | |
| Pressure | 0.2 to 0.5 Mpa | ||
| Temperature | 5 to 30 ˚C | ||
| Weight | 39 kg | ||
