TMP | TMP-2804LM | TMP-2804LMC | TMP-2804LMB | TMP-2804LMF | |
---|---|---|---|---|---|
Rotor coating | None | Coated | |||
Applicable power supply | EI-R04M | ||||
Inlet flange | VG250 / ISO250B | ||||
Outlet flange | KF40 | ||||
Cooling method | Water cooled | ||||
Ultimate pressure (after baking) Pa (Torr)
|
10 -7 Pa order | ||||
Maximum flowrate of Ar gas | 1250 mL/min | 1900 mL/min | 2850 mL/min | 2950 mL/min | |
Maximum inlet pressure during
continuous operation (N 2) |
40 Pa | ||||
Maximum outlet pressure during continuous operation | 270 Pa | ||||
Pumping speed | N 2 | [VG250] | 2800 L/s | [ISO250B] | 2500 L/s |
He | 2800 L/s | 2600 L/s | |||
H 2 | 2100 L/s | 2000 L/s | |||
Compression ratio | N 2 | 1×(10 9) min. | |||
He | 1×(10 5) | ||||
H 2 | 6×(10 3) | ||||
Rated rotation speed | 27600 rpm | ||||
Startup time | Within 12 minutes | ||||
Direction of installation | Arbitrary | ||||
Baking temperature of pump inlet | 120 ˚C or lower | ||||
Vibration, measured by the Shimadzu method | Less than 0.01 µm (single amplitude) | ||||
Recommended purge gas flowrate | 30 mL/min | ||||
Recommended pumping speed of backing
vacuum pump during gas purging |
1500 L/min or higher | ||||
Operational ambient temperature range | Operation: 0 ˚C to 40 ˚C /
Storage: -25 ˚C to 70 ˚C |
||||
Allowable magnetic flux density | Radial directions | 3 mT | |||
Axial directions | 15 mT | ||||
Cooling water | Flowrate | 2 to 4 L/min | |||
Pressure | 0.2 to 0.5 mpa | ||||
Temperature | 5 to 25 ˚C | ||||
Weight | 84 kg |