TMP | TMP-3804LMC | TMP-3804LMF | |
---|---|---|---|
Rotor coating | Coated | ||
Applicable power supply | EI-R04M | ||
Inlet flange | VG300/ISO320B | ||
Outlet flange | KF40 | ||
Cooling method | Water cooled | ||
Ultimate pressure (after baking) Pa (Torr) | 10 -7 Pa order | ||
Maximum flowrate of Ar gas | 1900 mL/min | 2800 mL/min | |
Maximum inlet pressure during
continuous operation (N 2) |
40 Pa | ||
Maximum outlet pressure during continuous operation | 270 Pa | ||
Pumping speed | N 2 | [VG300] 3800L/s | [ISO320B] 4000 L/s |
He | - | - | |
H 2 | 2500 L/s | 2500 L/s | |
Compression ratio | N 2 | 1×(10 9min.) | |
He | 1×(10 5) | ||
H 2 | 6×(10 3) | ||
Rated rotation speed | 24000 rpm | ||
Startup time | Within 18 minutes | ||
Direction of installation | Arbitrary | ||
Baking temperature of pump inlet | 120˚C or lower | ||
Vibration, measured by the Shimadzu method | Less than 0.01 µm (single amplitude) | ||
Recommended purge gas flowrate | 30 mL/min | ||
Recommended pumping speed of backing
vacuum pump during gas purging |
1500 L/min or higher | ||
Operational ambient temperature range | Operation:0 ˚C to 40 ˚C /
Storage: -25 ˚C to 70 ˚C |
||
Allowable magnetic flux density | Radial directions | 3 mT | |
Axial directions | 15 mT | ||
Cooling water | Flowrate | 2 to 4 L/min | |
Pressure | 0.2 to 0.5 Mpa | ||
Temperature | 5 to 25 ˚C | ||
Weight | 105 kg |