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Shimadzu Korea Vacuum Equipment Co., Ltd.

PRODUCT INDUSTRIAL MACHINERY

BEST for Semi & FPD Customers

Turbo Molecular Pump

TMP-V2304
TMP TMP-V2304
Inlet flange VG250 / ISO250B
Outlet flange KF40
Cooling Method Water Cooled
Mass 56 kg
Ultimate pressure (after baking) 10 -7 Pa order
Maximum allowable flow rate Ar 600mL/min
Maximum allowable inlet pressure
(N 2 continuous exhaust)
4.5Pa
Maximum allowable outlet pressure
(N 2 continuous exhaust)
200Pa
Pumping speed N 2 2100 L/s
Ar 2000 L/s
Compression ratio N 2 1×(10 8) or more
He 5×(10 3)
H 2 9×(10 2)
Rated speed 33,700 rpm
Start-up time 9 minutes or less
Mounting position In any desired direction
Vibration level
(by Shimadzu's method)
0.01 μm or less (0-peak)
Recommended pumping speed of
backing pump in case of gas purge
1500L/min or more
Display LED POWER / STATUS / ROTATION / NET
Communication Contact REMOTE (D-sub 37 pin female, Screw lock size M2.6)
(cf.Section 6.7 "Remote-Control Connector")
Input : START / STOP / RESET / LOW SPEED
Output : ROTATION / ACC. / BRAKE / NORMAL
            REMOTE / ALARM / WARNING / CONNECTION
Serial RS-232C / RS-485
(D-sub 9 pin male, Screw lock size M2.6)
Speed variation Speed is variable between 25% and 100% of the rated
speed (set as 0.1%).
Water Flow rate 3 to 4 L/min
Pressure 0.2 to 0.5 MPa
Temperature 19 to 30 ℃ (above dew point)
Admissible ambient
magnetic field
Radial direction 3 mT
Axial direction 15 mT