Shimadzu Korea Vacuum Equipment Co., Ltd.
- Turbo Molecular Pump
- Helium Leak Detector
- Hydraulic Gear Pump
- Oil Rotary Vacuum Pump
- Balancing Machine
- Sputtering Machine
- Vacuum Heat-Treatment
- X-Ray Inspection System
TMP-V3304
| Turbo molecular pump (Note 1) | TMP-V3304LM (0) | TMP-V3304LM | ||
|---|---|---|---|---|
| Inlet flange | VG300 | ISO320B / VG350 | ||
| Outlet flange | KF40 | |||
| Cooling method | Water | |||
| Ultimate pressure (after baking) | 10-7 Pa order | |||
| Maximum allowable Argon gas flow rate (Note 2, Note 3) |
1500 mL/min | |||
| Maximum allowable inlet pressure (N2 continuous exhaust) |
7 Pa | |||
| Maximum allowable outlet pressure (N2 continuous exhaust) |
270 Pa | |||
| Pumping speed (Note 4) |
N2 | 3200 L/s | ||
| Ar | 3100 L/s | |||
| Compression ratio | N2 | 1×109 or more | ||
| He | 1×105 | |||
| H2 | 6×103 | |||
| Rated speed | 27600 rpm | |||
| Start-up time | 16 minutes or less | |||
| Mounting position | In any desired direction | |||
| Vibration level (by Shimadzu's method) | 0.01 μm or less (0-peak) | |||
| Recommended flow rate of purge gas (Note 2) |
30 mL/min | |||
| Recommended pumping speed of backing pump in case of gas purge |
1500 L/min or more | |||
| Environment temperature | 10 to 40 degrees C. | |||
| Display | LED | POWER / STATUS / ROTATION / NET | ||
| Communication | Contact | REMOTE (D-sub 37 pin female, Screw lock size M2.6)
Input : START / STOP / RESET / LOW SPEED Output : ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING / CONNECTION |
||
| Serial | RS-232C / RS-485 (D-sub 9 pin male, Screw lock size M2.6) | |||
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %) |
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| Water | Flow rate | 3 to 4 L/min | ||
| Pressure | 0.2 to 0.4 MPa | |||
| Temperature | 19 to 30 degrees C. (above dew point) | |||
| Admissible ambient magnetic field |
Radial direction | 3 mT | ||
| Axial direction | 15 mT | |||
| Input electric power | Voltage | Single phase 200 to 240 VAC ± 10 % (50 / 60 Hz ± 2 Hz) | ||
| Maximum power | 1.2 kVA | |||
| Mass | 94 kg | |||
| (Note 1) | Do not use corrosive gas because there is possibility that the pump breaks down by the product material. |
| (Note 2) | mL/min: volume flow rate at 0 degrees C., 1 atm (Compatible with SCCM). |
| (Note 3) | The maximum allowable flow rate depends on the gas type, the APC valve temperature, the gas purge flow rate and outlet pressure. |
| (Note 4) | Without a protective net. Pumping speed for N2 is 2900 L/s with a protective net. |
