Shimadzu Korea Vacuum Equipment Co., Ltd.
- Turbo Molecular Pump
- Helium Leak Detector
- Hydraulic Gear Pump
- Oil Rotary Vacuum Pump
- Balancing Machine
- Sputtering Machine
- Vacuum Heat-Treatment
- X-Ray Inspection System
TMP-V2804
| TMP | TMP-V2804LM (F) | TMP-V2804LMC (F) | |
|---|---|---|---|
| Inlet flange | VG250 | ||
| Outlet flange | KF40 | ||
| Cooling Method | Water Cooled | ||
| Mass | 94 kg | ||
| Ultimate pressure (after baking) | 10 -7 Pa order | ||
| Maximum flow quantity | Ar | 1500mL/min | 1900mL/min |
| N 2 | 2750mL/min | 2750mL/min | |
| Maximum allowable inlet pressure | 7 Pa | ||
| Maximum allowable outlet pressure | 270 Pa | ||
| Pumping speed | N 2 | 2800 L/s | |
| Ar | 2700 L/s | ||
| Compression ratio | N 2 | 1×(10 9) or more | |
| He | 1×(10 5) | ||
| H 2 | 6×(10 3) | ||
| Rated speed | 27,600 rpm | ||
| Start-up time | 16 minutes or less | ||
| Mounting position | In any desired direction | ||
| Vibration level
(by Shimadzu's method) |
0.01 μm or less (0-peak) | ||
| Recommended pumping speed of
backing pump in case of gas purge |
1500 L/min or more | ||
| Display | LED | POWER / STATUS / ROTATION / NET | |
| Communication | Contact | REMOTE (D-sub 37 pin female, Screw lock size M2.6)
Input : START / STOP / RESET / LOW SPEED Output : ROTATION / ACC. / BRAKE / NORMAL REMOTE / ALARM / WARNING / CONNECTION |
|
| Serial | RS-232C / RS-485
(D-sub 9 pin male, Screw lock size M2.6) |
||
| Speed variation | Speed is variable between 25% and 100% of the
rated speed (set as 0.1%) |
||
| Water | Flow rate | 3 to 4 L/min | |
| Pressure | 0.2 to 0.4 Mpa | ||
| Temperature | 19 to 30 ℃ (above dew point) | ||
| Admissible ambient
magnetic field |
Radial direction | 3 mT | |
| Axial direction | 15 mT | ||
