TMP | TMP-X1205LM | TMP-X1605LM | |
---|---|---|---|
Rotor coating | None | None | |
Applicable power supply | ONBOARD TYPE | ||
Inlet flange | VG150 / ISO160B | VG200 / VG250 | |
ISO200B / ISO250B | |||
Outlet flange | KF40 | ||
Cooling method | Water cooled | ||
Ultimate pressure (after baking) Pa (Torr)
|
10 -7 Pa order | ||
Maximum inlet pressure during | 28 Pa | ||
Maximum outlet pressure during continuous operation | 266 Pa | ||
Pumping speed | N 2 | 1080 L/s, 950 L/s | 1400L/s, 1490L/s |
Ar | 1020 L/s, 890 L/s | 1330L/s, 1420L/s | |
H 2 | 710 L/s, 680 L/s | 750L/s, 780L/s | |
Compression ratio | N 2 | 2×(10 8) min. | |
H 2 | 8×(10 2) | ||
Rated rotation speed | 37200 rpm | ||
Startup time | Within 8 minutes | ||
Direction of installation | Arbitrary | ||
Baking temperature of pump inlet | 120 ˚C or lower | ||
Vibration, measured by the Shimadzu method | Less than 0.01 µm (single amplitude) | ||
Recommended purge gas flowrate | 30 mL/min | ||
Admissible pumping speed of vacking
vacuum pump in case of gas purge |
600 L/min or more | ||
Operational ambient temperature range | Operation: 0 ˚C to 40 ˚C /
Storage: -25 ˚C to 70 ˚C |
||
Allowable magnetic flux density | Radial directions | 3 mT | |
Axial directions | 15 mT | ||
Cooling water | Flowrate | 34 L/min | |
Pressure | 0.2 to 0.5 mpa | ||
Temperature | 19 to 30 ˚C | ||
Weight | 43 kg |