Shimadzu Korea Vacuum Equipment Co., Ltd.
- Turbo Molecular Pump
- Helium Leak Detector
- Hydraulic Gear Pump
- Oil Rotary Vacuum Pump
- Balancing Machine
- Sputtering Machine
- Vacuum Heat-Treatment
- X-Ray Inspection System
특 징
진공장비 제작 및 유지비용 절감에 기여합니다.
- 수명이 긴 베어링 메커니즘을 적용하여 유지보수 비용을 절감할 수 있습니다.
- 소형 보조펌프와 조합하여 사용할 수 있습니다.
- 모든 방향으로 장착이 가능합니다.
TMP-B300
| Turbo molecular pump model | TMP-B300 | ||
|---|---|---|---|
| Cooling method | Convection | Forced air by cooling fan | |
| Ultimate pressure (note 2) | After baking | − (note 1) | 10 -8 Pa order (note 2) |
| Non-baking | 10 -6 Pa order | 10 -6 Pa order | |
| Pumping speed (note 3) | N 2 | 280 L/s | 280 L/s |
| He | 270 L/s | 270 L/s | |
| H 2 | 220 L/s | 220 L/s | |
| Compression ratio | N 2 | > 1 x 10 9 | > 1 x 10 9 |
| He | 7×10 6 | 7×10 6 | |
| H 2 | 1×10 5 | 1×10 5 | |
| Critical backing pressure | 1500 Pa | 1500 Pa | |
| Maximum allowable continuous
backing pressure (note 4) |
N 2 | 100 Pa
(ambient < 35°C) |
1000 Pa
(ambient 25°C) 930 Pa (ambient 35°C) |
| Maximum allowable gas throughput at
continuous pumping |
10 SCCM
(ambient 25°C) 4 SCCM (ambient 35°C) |
100 SCCM
(ambient 25°C) 40 SCCM (ambient 35°C) |
|
| weight | VG, ISO | 6 kg | 6.3 kg |
| ICF | 9 kg | 9.3 kg | |
| Bearing type | Passive magnetic bearing and ceramic bearing | ||
| Inlet flange
|
VG100, DN100CF, ISO100K | ||
| Outlet port | KF16 | ||
| Rated speed | 60000 rpm | ||
| Stat-up time（up to 80 %） | 3.5 minutes | ||
| Mounting direction | In any desired direction | ||
| Noise [Shimadzu's method] (note 5) | ≤ 50 dBA | ||
| Admissible ambient magnetic field | Radial direction | 3 mT | |
| Axial direction | 15 mT | ||
| Input electric power | Voltage | DC24 V ± 5 % | |
| Maximum power | 180 W | ||
| (Note 1) | Only pumps equipped with a CF flange and cooling fan can be baked. |
| (Note 2) | When using a two-stage oil-sealed rotary pump as an auxiliary pump. |
| (Note 3) | When no protective net is used. Pumping speed for N 2 is 260 L/s when a protective net is used. |
| (Note 4) | Maximum allowable backing pressure for continuous running when gas throughput at inlet port is 0 mL/min |
| (Note 5) | Measured for the ISO flange model. |
