Shimadzu Korea Vacuum Equipment Co., Ltd.
- Turbo Molecular Pump
- Helium Leak Detector
- Hydraulic Gear Pump
- Oil Rotary Vacuum Pump
- Balancing Machine
- Sputtering Machine
- Vacuum Heat-Treatment
- X-Ray Inspection System
PHS
|
모델 |
유효사이즈(mm) |
최고온도 |
처리양 |
도달압력 |
최고압력 |
설비전력 |
사용가스 |
|---|---|---|---|---|---|---|---|
|
폭×높이×깊이 |
(℃) |
(kg gross) |
(Pa) |
(MPa) |
(kVA) | ||
|
PHSgr20/20/50/50 |
200×200×500 |
1600
|
50 |
7x10
-1
|
0.9MPa |
110 |
N 2,Ar,(H 2) |
|
PHSgr30/30/60 |
300×300×600 |
100 |
140 | ||||
|
PHSgr40/40/100 |
400×400×1000 |
250 |
170 | ||||
|
PHSgr50/50/120 |
500×500×1200 |
400 |
210 |
