Shimadzu Korea Vacuum Equipment Co., Ltd.
- Turbo Molecular Pump
- Helium Leak Detector
- Hydraulic Gear Pump
- Oil Rotary Vacuum Pump
- Balancing Machine
- Sputtering Machine
- Vacuum Heat-Treatment
- X-Ray Inspection System
- Optical Devices
TMP-403 공냉
| TMP | TMP-403M | TMP-403MC | |
|---|---|---|---|
| Rotor coating | None | Coated | |
| Applicable power supply | EI-S04M | ||
| Inlet flange | VG150 / ICF203 / ISO160B / ISO160C | ||
| Outlet flange | KF25 | ||
| Cooling method | Air cooled | ||
| Ultimate pressure (after baking) Pa (Torr) | 10 -8 Pa order | 10 -7 Pa order | |
| Maximum inlet pressure during
continuous operation (N 2) |
1.3 Pa | ||
| Maximum outlet pressure during
continuous operation |
40 Pa | ||
| Pumping speed | N 2 | 420 L/s | |
| He | 360 L/s | ||
| H 2 | 340 L/s | ||
| Compression ratio | N 2 | 1×(10 9) | |
| He | 8×(10 4) | ||
| H 2 | 1×(10 4) | ||
| Rated rotation speed | 45000 rpm | ||
| Startup time | Within 5 minutes | ||
| Direction of installation | Arbitrary | ||
| Baking temperature of pump inlet | 120˚C or lower | ||
| Vibration, measured by the Shimadzu method | Less than 0.012µm (single amplitude) | ||
| Recommended purge gas flowrate | 20 to 30mL/min | ||
| Recommended pumping speed of backing
vacuum pump during gas purging |
200 L/min or higher | ||
| Operational ambient temperature range | Operation:0˚C to 40˚C /
Storage: -25˚C to 70˚C |
||
| Allowable magnetic flux density | Radial directions | 3 mT | |
| Axial directions | 15 mT | ||
| Weight | 14 kg | ||
