Shimadzu Korea Vacuum Equipment Co., Ltd.
- Turbo Molecular Pump
- Helium Leak Detector
- Hydraulic Gear Pump
- Oil Rotary Vacuum Pump
- Balancing Machine
- Sputtering Machine
- Vacuum Heat-Treatment
- X-Ray Inspection System
- Optical Devices
TMP-V1704
| TMP | TMP-V1704LM | |
|---|---|---|
| Inlet flange | VG200 / ISO200B | |
| Outlet flange | KF40 | |
| Cooling Method | Water Cooled | |
| Mass | 60 kg | |
| Ultimate pressure (after baking) | 10 -7 Pa order | |
| Maximum flow quantity(Ar) | 600 mL/min | |
| Maximum allowable inlet pressure
(N 2 continuous exhaust) |
4.5 Pa | |
| Maximum allowable outlet pressure
(N 2 continuous exhaust) |
20 Pa | |
| Pumping speed
|
N 2 | 1400 L/s |
| Ar | 1350 L/s | |
| Compression ratio | N 2 | 1×(10 8) or more |
| He | 5×(10 3) | |
| H 2 | 9×(10 2) | |
| Rated speed | 33,700 rpm | |
| Start-up time | 9 minutes or less | |
| Mounting position | In any desired direction | |
| Vibration level
(by Shimadzu's method) |
0.01 μm or less (0-peak) | |
| Admissible pumping speed of backing vacuum pump in case of gas purge | 1500 L/min or more | |
| Display | LED | POWER / STATUS / ROTATION / NET |
| Communication | Contact | REMOTE(D-sub 37 pin female, Screw lock size M2.6)
Input : START / STOP / RESET / LOW SPEED Output : ROTATION / ACC. / BRAKE / NORMAL REMOTE / ALARM / WARNING / CONNECTION |
| Serial | RS-232C / RS-485
(D-sub 9 pin male, Screw lock size M2.6) |
|
| Speed variation | Speed is variable between 25% and 100% of the rated
speed (set as 0.1%). |
|
| Water | Flow rate | 3 to 4 L/min |
| Pressure | 0.2 to 0.4 MPa | |
| Temperature | 19 to 30 ℃ (above dew point) | |
| Admissible ambient
magnetic field |
Radial direction | 3 mT |
| Axial direction | 15 mT | |
