Shimadzu Korea Vacuum Equipment Co., Ltd.
- Turbo Molecular Pump
- Helium Leak Detector
- Hydraulic Gear Pump
- Oil Rotary Vacuum Pump
- Balancing Machine
- Sputtering Machine
- Vacuum Heat-Treatment
- X-Ray Inspection System
- Optical Devices
TMP-X1205, X1605
| TMP | TMP-X1205LM | TMP-X1605LM | |
|---|---|---|---|
| Rotor coating | None | None | |
| Applicable power supply | ONBOARD TYPE | ||
| Inlet flange | VG150 / ISO160B | VG200 / VG250 | |
| ISO200B / ISO250B | |||
| Outlet flange | KF40 | ||
| Cooling method | Water cooled | ||
| Ultimate pressure (after baking) Pa (Torr)
|
10 -7 Pa order | ||
| Maximum inlet pressure during | 28 Pa | ||
| Maximum outlet pressure during continuous operation | 266 Pa | ||
| Pumping speed | N 2 | 1080 L/s, 950 L/s | 1400L/s, 1490L/s |
| Ar | 1020 L/s, 890 L/s | 1330L/s, 1420L/s | |
| H 2 | 710 L/s, 680 L/s | 750L/s, 780L/s | |
| Compression ratio | N 2 | 2×(10 8) min. | |
| H 2 | 8×(10 2) | ||
| Rated rotation speed | 37200 rpm | ||
| Startup time | Within 8 minutes | ||
| Direction of installation | Arbitrary | ||
| Baking temperature of pump inlet | 120 ˚C or lower | ||
| Vibration, measured by the Shimadzu method | Less than 0.01 µm (single amplitude) | ||
| Recommended purge gas flowrate | 30 mL/min | ||
| Admissible pumping speed of vacking
vacuum pump in case of gas purge |
600 L/min or more | ||
| Operational ambient temperature range | Operation: 0 ˚C to 40 ˚C /
Storage: -25 ˚C to 70 ˚C |
||
| Allowable magnetic flux density | Radial directions | 3 mT | |
| Axial directions | 15 mT | ||
| Cooling water | Flowrate | 34 L/min | |
| Pressure | 0.2 to 0.5 mpa | ||
| Temperature | 19 to 30 ˚C | ||
| Weight | 43 kg | ||
