Shimadzu Korea Vacuum Equipment Co., Ltd.
- Turbo Molecular Pump
- Helium Leak Detector
- Hydraulic Gear Pump
- Oil Rotary Vacuum Pump
- Balancing Machine
- Sputtering Machine
- Vacuum Heat-Treatment
- X-Ray Inspection System
TMP-2404
| TMP | TMP-2404LM(0) | TMP-2404LMC | TMP-2404LMTC | TMP-2404LMTB | |
|---|---|---|---|---|---|
| Rotor coating | None | Coated | |||
| Applicable power supply | EI-R04M | EI-R04MT | |||
| Inlet flange | VG250 / ISO250B | ||||
| Outlet flange | KF40 | ||||
| Cooling method | Water cooled | ||||
| Ultimate pressure (after baking) Pa (Torr)
|
10 -7 Pa order | ||||
| Maximum flowrate of Ar gas | 2100 mL/min | 2800 mL/min | 1700 mL/min | 2250 mL/min | |
| Maximum inlet pressure during
continuous operation (N 2) |
40 Pa | ||||
| Maximum outlet pressure during continuous operation | 270 Pa | ||||
| Pumping speed | N 2 | 2100 L/s | |||
| He | 2240 L/s | ||||
| H 2 | 1770 L/s | ||||
| Compression ratio | N 2 | 1×(10 9) min. | |||
| He | 7×(10 4) | ||||
| H 2 | 3×(10 3) | ||||
| Rated rotation speed | 27000 rpm | ||||
| Startup time | Within 11 minutes | ||||
| Direction of installation | Arbitrary | ||||
| Baking temperature of pump inlet | 120 ˚C or lower | ||||
| Vibration, measured by the Shimadzu method | Less than 0.01 µm (single amplitude) | ||||
| Recommended purge gas flowrate | 20 to 100 mL/min | ||||
| Recommended pumping speed of backing
vacuum pump during gas purging |
1300 L/min or higher | ||||
| Operational ambient temperature range | Operation: 0 ˚C to 40 ˚C /
Storage: -25 ˚C to 70 ˚C |
||||
| Allowable magnetic flux density | Radial directions | 3 mT | |||
| Axial directions | 15 mT | ||||
| Cooling water | Flowrate | 2 to 4 L/min | |||
| Pressure | 0.2 to 0.5 mpa | ||||
| Temperature | 5 to 25 ˚C | ||||
| Weight | 70 kg | ||||
