Shimadzu Korea Vacuum Equipment Co., Ltd.
- Turbo Molecular Pump
- Helium Leak Detector
- Hydraulic Gear Pump
- Oil Rotary Vacuum Pump
- Balancing Machine
- Sputtering Machine
- Vacuum Heat-Treatment
- X-Ray Inspection System
TMP-X4304, X3804
| TMP | TMP-X4304LM | TMP-X3804LM | ||
|---|---|---|---|---|
| Inlet flange | VG350 | VG300 | ||
| Outlet flange | KF40 | |||
| Mass | 135 kg (Included fixed plate) | 145 kg (Included fixde plate) | ||
| Ultimate pressure
(after baking) |
10 -7 Pa order | |||
| Maximum flow quantity | 30 mL/min
(depends on the gas type, valve temperature) |
|||
| Maximum allowable outlet pressure | 270 Pa | |||
| Pumping speed | N 2 | 4400 L/s | 3800 L/s | |
| Ar | 4200 L/s | 3400 L/s | ||
| H 2 | 2600 L/s | 2500 L/s | ||
| Compression ratio | N 2 | 1×(10 9) or more | ||
| He | 3×(10 4) | |||
| H 2 | 2×(10 3) | |||
| Rated speed | 24000 rpm | |||
| Start-up time | 18 mimutes or less | |||
| Mounting position | Vertical | |||
| Vibration level
(by Shimadzu's method) |
0.01μm or less (0-peak) | |||
| Admissible flow rate of purge gas | 30 mL/min | |||
| Admissible pumping speed of
backing pump in case of gas purge |
1500 L/min or more | |||
| Display | LED | POWER / ROTATION / TEMP.CONTROL / ALARM | ||
| Communication | Contact | REMOTE (D-sub 25 pin female, Screw lock size : UNC 4-40)
Input : START / STOP / RESET / LOW SPEED Output : ROTATION / NORMAL / ACCELERATION / BRAKE / REMOTE / TEMP.STABLE /ALARM / WARNING |
||
| Serial | RS-232C / RS-485 | |||
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed
(set as 0.1 %) |
|||
| Admissible ambient
magnetic field |
Radial direction | 3 mT | ||
| Axial direction | 15 mT | |||
